Reference details
- Reference
- EN 62047-17:2015
- Official title
- Semiconductor devices - Micro-electromechanical devices - Part 17: Bulge test method for measuring mechanical properties of thin films
- Organisation
- CENELEC
- Publisher status in source
- PublishedThis is the status recorded in the source, not a statement that this is the latest edition.
- Source access
- 19 October 2026
Research and application
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Product research routes
- Measurement, test and laboratory equipment
Measurement function, accuracy claims, electrical safety and the conditions under which results are comparable.
Questions for the evidence file
- Measurement model
- Uncertainty budget
- Calibration traceability
- Environmental and sample conditions
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