Reference details

Reference
EN 62047-13:2012
Official title
Semiconductor devices - Micro-electromechanical devices - Part 13: Bend- and shear- type test methods of measuring adhesive strength for MEMS structures
Organisation
CENELEC
Publisher status in source
PublishedThis is the status recorded in the source, not a statement that this is the latest edition.
Source access
19 October 2026

Research and application

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Product research routes

Questions for the evidence file

  • Measurement model
  • Uncertainty budget
  • Calibration traceability
  • Environmental and sample conditions
  • Substance and formulation identity
  • Sample preparation

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